Reliability of MEMS: Testing of Materials and Devices (Advanced Micro and Nanosystems) | 
 enlarge | Creators: Osamu Tabata, Toshiyuki Tsuchiya, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink
Publisher: Wiley-VCH
Category: Book
List Price: $230.00
Buy New: $177.68
You Save: $52.32 (23%)
New (17) from $177.68
Sales Rank: 1807715
Media: Hardcover
Number Of Items: 1
Pages: 324
Shipping Weight (lbs): 1.6
Dimensions (in): 9.6 x 6.8 x 0.8
ISBN: 3527314946
Dewey Decimal Number: 620
EAN: 9783527314942
ASIN: 3527314946
Publication Date: February 15, 2008
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Product Description
This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.
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